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Volume 2 | Issue 1 | Year 2023 | Article Id: DST-V2I1P101 DOI: https://doi.org/10.59232/DST-V2I1P101
Power Control System Fabrication for Sample Holder with Heating Hot Filament
Leonardo Carlos Afonso, José Roberto R. Bortoleto, Péricles Lopes Sant'Ana
| Received | Revised | Accepted | Published |
|---|---|---|---|
| 11 Jan 2023 | 09 Feb 2023 | 24 Feb 2023 | 14 Mar 2023 |
Citation
Leonardo Carlos Afonso, José Roberto R. Bortoleto, Péricles Lopes Sant'Ana. “Power Control System Fabrication for Sample Holder with Heating Hot Filament.” DS Journal of Digital Science and Technology, vol. 2, no. 1, pp. 1-17, 2023.
Abstract
In this article, we introduce the fabrication of a phase-angle power controller module and its coupling of a hot filament for heating a sample holder in low-pressure plasma systems. The sample holder was adapted to a vacuum system for the growth of oxide films by the PECVD (Plasma Enhanced Chemical Vapor Deposition) technique in order to control the temperature of the substrate during the film deposition. Then, the power circuit was based on the TRIACs circuit, while the temperature was measured using a thermocouple coupled to the front of the sample holder. microcontroller from Microchip's PIC 18F family was used to control the module. Finally, the PID control logic was developed in C language. Results showed that the heating of the sample holder reached over 70 ºC for over 1200 s, in a growing and non-linear fit. Diverse surface properties of these films found many applications in nanotechnology, and the temperature during the film growth is a key parameter for film properties, including the nucleation in the first stages, surface morphology, wettability, transmittance and absorbance at the visible range, electrical surface properties 'and others.
Keywords
PID control, Phase angle triggering, PECVD, Temperature.
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